Process integration for ULSI devices. CMOS well/isolation/gate module technology. Contact module technology. Interconnect and Metallization. Applications of Thin Films
| Academic Units | 3 |
| Exam Schedule | Mon Apr 28 2025 00:00:00 GMT+0000 (Coordinated Universal Time) 13:00-15:00 |
| Grade Type | Letter Graded |
| Department Maintaining | MAT |
| Prerequisites | MS3012(Corequisite) |
| Mutually Exclusive |
| Index | Type | Group | Day | Time | Venue | Remark |
|---|
0930
1030
1130
1230
1330
1430
1530
1630
1730
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