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MS3012 MICRO/NANOELECTRONIC MATERIALS PROCESSING

Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices

Academic Units3
Exam ScheduleMon May 04 2026 00:00:00 GMT+0000 (Coordinated Universal Time) 09:00-11:00
Grade TypeLetter Graded
Department MaintainingMAT
Mutually Exclusive

MS3002

Indexes

IndexTypeGroupDayTimeVenueRemark
-LEC/STUDIOLETUE0930-1120LT19

Course Schedule

0930

1030

1130

1230

1330

1430

1530

1630

1730

MON
TUE

MS3012

LEC/STUDIO | LT19

MS3012

15221

TUT | LT10

Teaching Wk2-13

MS3012

15222

TUT | LT10

Teaching Wk2-13

WED

MS3012

15223

TUT | LT11

Teaching Wk2-13

THU
FRI
SAT

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