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MS3012 MICRO/NANOELECTRONIC MATERIALS PROCESSING

Microelectronics Technology Overview. Semiconductor Device Physics. Bulk Crystal Growth. Diffusion and Thermal Oxidation. Ion Implantation & Simulation. Thin Film Deposition. Patterning. Advanced Lithography. Advanced Deposition Techniques. Advanced Devices

Academic Units3
Exam ScheduleWed Nov 26 2025 00:00:00 GMT+0000 (Coordinated Universal Time) 09:00-11:00
Grade TypeLetter Graded
Department MaintainingMAT
Mutually Exclusive

MS3002

Indexes

IndexTypeGroupDayTimeVenueRemark
-LEC/STUDIOLEMON1230-1420LT14Teaching Wk1-9,11-13
LEC/STUDIOLEMON1230-1420ONLINETeaching Wk10

Course Schedule

0930

1030

1130

1230

1330

1430

1530

1630

1730

MON

MS3012

LEC/STUDIO | LT14

Teaching Wk1-9,11-13

MS3012

LEC/STUDIO | ONLINE

Teaching Wk10

TUE

MS3012

15221

TUT | LT10

Teaching Wk2-9,11-13

MS3012

15222

TUT | LT10

Teaching Wk2-9,11-13

MS3012

15221

TUT | ONLINE

Teaching Wk10

MS3012

15222

TUT | ONLINE

Teaching Wk10

WED
THU
FRI
SAT

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