This course aims to provide you with fundamental knowledge of various semiconductor wafer fabrication technologies, their principles, systems and operations. You will learn basic concepts, structures, principles, and operation of semiconductor single crystal growth technology, vacuum technology, thermal annealing, semiconductor characterizations, semiconductor epitaxial growths, IC fabrication and MEMS processes. The knowledge you learnt in this course will enable you to gain a strong understanding of various technologies widely used in microfabrications.
| Academic Units | 3 |
| Exam Schedule | Tue Apr 29 2025 00:00:00 GMT+0000 (Coordinated Universal Time) 09:00-11:00 |
| Grade Type | Letter Graded |
| Department Maintaining | EEE |
| Prerequisites |
| Index | Type | Group | Day | Time | Venue | Remark |
|---|
0930
1030
1130
1230
1330
1430
1530
1630
1730
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